Thickness analysis of nanometer thin films based on electron yields
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DOI: 10.1007/s12648-019-01673-7
Abstract: Determination of the thickness of a nanometer thin film is an important topic in the nanostructure characterization field. Currently, the X-ray photoelectron spectroscopy and the ellipsometer have been used to analyze the film thickness. This… read more here.
Keywords: thickness analysis; electron yields; film thickness; thickness ... See more keywords