Microstructure and phonon behavior in W/Si periodic multilayer structures
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DOI: 10.1088/1361-6463/ac4729
Abstract: The crystallinity of the tungsten (W) phase was improved with an increase in the thickness of this layer in the periodic W/Si multilayer structure. Both the α- and β-W phases were grown simultaneously and the… read more here.
Keywords: thickness layers; phase; thickness; increase thickness ... See more keywords