Thickness Mapping and Layer Number Identification of Exfoliated van der Waals Materials by Fourier Imaging Micro-Ellipsometry
Sign Up to like & getrecommendations! Published in 2022 at "ACS Nano"
DOI: 10.1021/acsnano.2c12773
Abstract: As performance of van der Waals heterostructure devices is governed by the nanoscale thicknesses and homogeneity of their constituent mono- to few-layer flakes, accurate mapping of these properties with high lateral resolution becomes imperative. Spectroscopic… read more here.
Keywords: fourier imaging; van der; ellipsometry; thickness mapping ... See more keywords
Machining-Based Coverage Path Planning for Automated Structural Inspection
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Transactions on Automation Science and Engineering"
DOI: 10.1109/tase.2016.2601880
Abstract: The automation of robotically delivered nondestructive evaluation inspection shares many aims with traditional manufacture machining. This paper presents a new hardware and software system for automated thickness mapping of large-scale areas, with multiple obstacles, by… read more here.
Keywords: system; inspection; coverage; thickness mapping ... See more keywords