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Published in 2023 at "Microscopy and Microanalysis"
DOI: 10.1093/micmic/ozad051
Abstract: In this study, a methodology for assessing the thickness of titanium nitride (TiN) coatings by energy dispersive X-ray spectroscopy (EDS) in the scanning electron microscope is explored. A standardless method is applied, where the film…
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Keywords:
assessing thickness;
equation;
spectroscopy;
thickness titanium ... See more keywords