Single Shot Line Profile Measurement of Multi-layered Film Thicknesses
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DOI: 10.1007/s12541-020-00410-z
Abstract: We propose a novel spectroscopic ellipsometry capable of measuring line profile of the film thicknesses with a single image at once. By adopting a polarization-pixelated CMOS camera and an imaging spectrometer, spatial, spectral and polarization… read more here.
Keywords: thicknesses single; line profile; film; film thicknesses ... See more keywords