Highly Sensitive Bulk Silicon Chemical Sensors with Sub-5 nm Thin Charge Inversion Layers.
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DOI: 10.1021/acsnano.8b00580
Abstract: There is an increasing demand for mass-producible, low-power gas sensors in a wide variety of industrial and consumer applications. Here, we report chemical-sensitive field-effect-transistors (CS-FETs) based on bulk silicon wafers, wherein an electrostatically confined sub-5… read more here.
Keywords: sub thin; thin charge; bulk silicon; charge inversion ... See more keywords