Preparation of Sn doped In2O3 multilayer films on n-type Si with optoelectronics properties improved by using thin Al–Cu metals interlayer films
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DOI: 10.1016/j.mssp.2021.105870
Abstract: Abstract High-performance transparent conductive Sn doped In2O3/Al–Cu/Sn doped In2O3 (ITO/Al–Cu/ITO) multilayer films were prepared by radio frequency magnetron sputtering of ITO and direct current magnetron sputtering of aluminium Al and copper Cu on n-type Silicon… read more here.
Keywords: thin metals; multilayer films; doped in2o3; metals interlayer ... See more keywords