Flexible, Reusable and Ultra-Thin Parylene-C/Cr Shadow Mask for Versatile Micropatterning Applications on Planar and Nonplanar Surfaces
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DOI: 10.1109/jmems.2018.2844326
Abstract: In this paper, a reusable, flexible, and ultra-thin parylene-C/Cr shadow mask for fabricating diverse micropatterns on arbitrary surfaces is introduced. The shadow mask is composed of 3- $\mu \text{m}$ parylene-C film and 100-nm Cr layer.… read more here.
Keywords: mask; thin parylene; shadow mask; ultra thin ... See more keywords