Pixel-based absolute surface metrology by three flat test with shifted and rotated maps
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DOI: 10.1016/j.optlaseng.2017.10.021
Abstract: Abstract In traditional three flat test, it only provides the absolute profile along one surface diameter. In this paper, an absolute testing algorithm based on shift-rotation with three flat test has been proposed to reconstruct… read more here.
Keywords: flat test; pixel based; surface; three flat ... See more keywords