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Analysis of uniform structured RF MEMS switch with different uniform and non-uniform meandering techniques

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Published in 2018 at "Microsystem Technologies"

DOI: 10.1007/s00542-018-3866-6

Abstract: This paper mainly focuses on the investigation of different meandering techniques for the MEMS RF shunt capacitive switch. It involves three meandering techniques for the switch, namely zig-zag, plus and three square meander. Actuating beam… read more here.

Keywords: switch three; step switch; meandering techniques; analysis uniform ... See more keywords