A compact real-time high-speed high-resolution vibrometer, surface profiler and dynamic focus tracker using three wavelengths parallel phase-shift interferometry
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DOI: 10.1016/j.optlaseng.2018.04.007
Abstract: Abstract The combination of simultaneous parallel phase shift interferometry with three wavelengths illumination and three spectral quad detectors integrated into a compact optical system is presented, achieving a real time, high speed, sub-nm axial resolution… read more here.
Keywords: three wavelengths; real time; phase shift; time high ... See more keywords