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Published in 2021 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/ac12c2
Abstract: The electron impact cross sections are reported for tetramethylsilane from the ionization threshold up to 5000 eV. The partial ionization cross sections (PICS) of the fragments created by ionization are obtained using a modified form…
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Keywords:
tetramethylsilane ionization;
cross sections;
ionization threshold;
threshold 5000 ... See more keywords