Performance of THz Components Based on Microstrip PECVD SiNx Technology
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DOI: 10.1109/tthz.2017.2759507
Abstract: We present a performance analysis of passive THz components based on Microstrip transmission lines with a 2-μm-thin plasma-enhanced chemical vapor deposition grown silicon nitride (PECVD SiNx) dielectric layer. A set of thru-reflect-line calibration structures is… read more here.
Keywords: thz components; components based; technology; pecvd sinx ... See more keywords