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Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2018.06.168
Abstract: Abstract The model of the nonlocal thermoelastic peak of low-energy ion is used in deriving an expression for intrinsic stress in multi-component material deposited from mixed beam of differently charged ions in modes of the…
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Keywords:
xalxn coatings;
ti1 xalxn;
xalxn;
intrinsic stresses ... See more keywords
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Published in 2019 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2019.07.008
Abstract: Abstract Ti1−xAlxN thin films were deposited using reactive high-power impulse magnetron sputtering on silicon Si (100), tungsten carbide (WC-Co), and SUS304 substrates using three metallurgical TixAly alloy targets with Al/(Al + Ti) atomic ratios of 0.19, 0.36,…
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Keywords:
ti1 xalxn;
thin films;
microscopy;
ratio ... See more keywords