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Published in 2019 at "Optical Engineering"
DOI: 10.1117/1.oe.58.4.044103
Abstract: Abstract. A circular grating moiré method is proposed for sensing the tilt magnitude (θ) and tilt direction (α) for tilt about two orthogonal axes. A device consisting of a pair of fixed (upper) and semifloating…
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Keywords:
tilt sensing;
axes tilt;
deg deg;
circular gratings ... See more keywords