Ultra-precision 3 DOF tilting stage for workpiece setup of scalable micro-pattern machining
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DOI: 10.1007/s12541-017-0129-x
Abstract: Micro-machining has been widely used for manufacturing of micro molds for flat panel displays. Because the mold has a large area and heavy weight, the workpiece setup system with a high stiffness and ultraprecise positioning… read more here.
Keywords: ultra precision; workpiece setup; micro; tilting stage ... See more keywords