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Published in 2018 at "Acta Materialia"
DOI: 10.1016/j.actamat.2017.11.044
Abstract: Abstract We have developed TiN/AlN/c-sapphire epitaxial heterostructures and compared it with TiN/c-sapphire epitaxial heterostructures, needed for GaN-based LEDs and lasers. AlN is used as a buffer layer to provide a high misfit strain and facilitate…
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Keywords:
tin aln;
tin sapphire;
tin;
aln ... See more keywords
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Published in 2019 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2019.01.031
Abstract: Abstract In this paper, the thermal study of a TiN/AlN superlattice was reported. The TiN/AlN superlattice was prepared by reactive magnetron sputtering. And the thermal stability was evaluated by X-ray diffraction measurement and TEM observation…
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Keywords:
high thermal;
aln high;
cubic aln;
aln superlattice ... See more keywords