The interaction between single droplet of molten tin and cooling water: Effects of tin droplet temperature and falling height
Sign Up to like & getrecommendations! Published in 2019 at "Annals of Nuclear Energy"
DOI: 10.1016/j.anucene.2018.11.014
Abstract: Abstract Experimental investigation on the interaction between molten tin droplets with water was conducted employing high-speed photography. The diameter of tin droplets was around 4.0 mm to 6.3 mm. Five tin droplet temperatures (300 °C, 350 °C, 400 °C, 450 °C,… read more here.
Keywords: tin droplet; interaction; temperature; tin ... See more keywords
Liquid Tin Droplet Generator in Laser-Produced Plasma Extreme Ultraviolet Source: A Review
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2024.3428621
Abstract: The 13.5-nm extreme ultraviolet (EUV) light radiated by laser-produced tin droplet plasma is successfully used in manufacturing integrated circuits with critical dimensions (CDs) below 7 nm. As a vital component in the EUV source, the… read more here.
Keywords: extreme ultraviolet; droplet; tin droplet; laser produced ... See more keywords