Design, fabrication and characterization of TiN sensing film-based ISFET pH sensor
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DOI: 10.1016/j.matlet.2021.130556
Abstract: Abstract In this work, we report the development of Titanium Nitride (TiN) as a sensing film for Ion-Sensitive Field-Effect Transistor (ISFET)-based pH sensor, which has been deposited using pulsed-DC (Direct Current) magnetron-assisted reactive sputtering process.… read more here.
Keywords: sensing film; tin sensing; isfet; film ... See more keywords