Interdiffusion behaviors observation in TiN/ZrO N bilayer by XAS and ToF-SIMS
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DOI: 10.1016/j.apsusc.2020.146968
Abstract: Abstract Interface behavior plays an important role in multilayer structure. The deep understanding of interface diffusion and reaction is necessary to improve the performance of device with multilayer structure. In the present work, we perform… read more here.
Keywords: tin zroxny; interdiffusion; tin; xas ... See more keywords