Bidirectional properties of TiC, TiN and TiNC thin films deposited by radio frequency magnetron sputtering.
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DOI: 10.3233/bme-201134
Abstract: BACKGROUND Titanium nitride (TiN), titanium carbide (TiC) and titanium carbonitride (TiNC) thin films show promising practical applications due to their photoelectric properties and corrosion behaviour. OBJECTIVE In this work, we investigated the factors which may… read more here.
Keywords: tin tin; thin films; tin; titanium ... See more keywords