Annealing of thin 'Tincone' films, a tin-based hybrid material deposited by molecular layer deposition, in reducing, inert, and oxidizing atmospheres
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DOI: 10.1116/1.5038867
Abstract: Molecular layer deposition of hybrid organic–inorganic thin films called “tincones” is achieved using tetrakisdimethylaminotin as the metal precursor and glycerol (GL) as the organic reactant. The GL-based process displays linear growth and self-limiting surface reactions… read more here.
Keywords: temperature; tincone films; microscopy; films annealed ... See more keywords