DC reactively sputtered TiNx thin films for capacitor electrodes
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Materials Science: Materials in Electronics"
DOI: 10.1007/s10854-018-9066-4
Abstract: Being used as typical electrode layers in the state-of-the-art microelectronic devices, titanium nitride (TiNx) thin films have to meet the critical requirements for high conductivity, low surface roughness and thickness. In this work, TiNx thin… read more here.
Keywords: thin films; sputtered tinx; surface roughness; tinx thin ... See more keywords
Titanium nitride thin film for temperature sensing and its conductive mechanism in the cryogenic region
Sign Up to like & getrecommendations! Published in 2018 at "Semiconductor Science and Technology"
DOI: 10.1088/1361-6641/aadf76
Abstract: Titanium nitride (TiNx) thin films were deposited by DC magnetron sputtering on polished and oxidized silicon wafers under different N2 flow rates, and temperature sensors based on the TiNx films were fabricated. The performance of… read more here.
Keywords: temperature; mechanism; thin film; tinx thin ... See more keywords