Cu-Doped TiNxOy Thin Film Resistors DC/RF Performance and Reliability
Sign Up to like & getrecommendations! Published in 2021 at "Applied Sciences"
DOI: 10.3390/app11167498
Abstract: We fabricated Cu-doped TiNxOy thin film resistors by using atomic layer deposition, optical lithography, dry etching, Ti/Cu/Ti/Au e-beam evaporation and lift-off processes. The results of the measurements of the resistance temperature dependence, non-linearity, S-parameters at… read more here.
Keywords: film resistors; thin film; resistance; film ... See more keywords
Optical Properties and Microstructure of TiNxOy and TiN Thin Films before and after Annealing at Different Conditions
Sign Up to like & getrecommendations! Published in 2019 at "Coatings"
DOI: 10.3390/coatings9010022
Abstract: TiN and TiNxOy thin films share many properties such as electrical and optical properties. In this work, a comparison is conducted between TiN (with and without annealing at 400 °C in air and vacuum) and… read more here.
Keywords: tinxoy thin; thin films; tin; optical properties ... See more keywords