Magnetron sputtered TiO x layers: Structural, electrical, optical and thermochromic aspects
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DOI: 10.1016/j.tsf.2017.12.019
Abstract: Abstract Titanium oxide layers were prepared by sputter deposition with plasma emission monitoring in the whole stoichiometry range between Ti and TiO2 without and with substrate heating to 240 °C. The layers were characterized with regard… read more here.
Keywords: layers structural; magnetron sputtered; structural electrical; tio layers ... See more keywords