Process temperature-dependent interface quality and Maxwell-Wagner interfacial polarization in atomic layer deposited Al2O3/TiO2 nanolaminates for energy storage applications.
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DOI: 10.1039/d3nr00909b
Abstract: Considering the excellent tunability of electrical and dielectric properties in binary metal oxide based multi-layered nanolaminate structures, a thermal atomic layer deposition system is carefully optimized for the synthesis of device grade Al2O3/TiO2 nanolaminates with… read more here.
Keywords: maxwell wagner; tio2 nanolaminates; atomic layer; temperature ... See more keywords