Optimized ICPCVD-Based TiO2 for Photonics
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DOI: 10.3390/ma15072578
Abstract: We propose obtaining TiO2 films by ICPCVD for the fabrication of low-loss waveguides. The challenge is to produce a dense and homogeneous layer with a high refractive index and low absorption in the visible range.… read more here.
Keywords: index; photonics; tio2 photonics; based tio2 ... See more keywords