Evolution of TiOx-SiOx nano-composite during annealing of ultrathin titanium oxide films on Si substrate
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DOI: 10.1016/j.ceramint.2020.05.060
Abstract: Abstract This paper discusses the formation of the TiOx-SiOx nano-composite phase during annealing of ultrathin titanium oxide films (~27 nm). The amorphous titanium oxide films are deposited on silicon substrates by sputtering. These films are important… read more here.
Keywords: nano composite; tiox siox; oxide films; siox nano ... See more keywords