Fabrication of sub-100 nm h-PDMS tip array for tip-based nanolithography by electrochemical machining
Sign Up to like & getrecommendations! Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-2883-6
Abstract: Tip-based nanolithography provides a flexible nano-lithographic technology. The tip fabrication is the main challenge of the technology. The combination of reactive ion etch and electrochemical machining provides a cost-efficient method for tip fabrication with nanoscale… read more here.
Keywords: array; tip based; fabrication; based nanolithography ... See more keywords
Fabrication of none-ridge nanogrooves with large-radius probe on PMMA thin-film using AFM tip-based dynamic plowing lithography approach
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Manufacturing Processes"
DOI: 10.1016/j.jmapro.2017.07.016
Abstract: Abstract In this study, the AFM tip-based dynamic plowing lithography (DPL) method is utilized to conduct nanoscratching tests on the poly(methyl methacrylate) (PMMA) thin-film surface. Aim to fabricate none-ridge nanogrooves, a relatively large-radius probe in… read more here.
Keywords: ridge nanogrooves; none ridge; afm tip; tip based ... See more keywords