Sign Up to like & get
recommendations!
0
Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-2883-6
Abstract: Tip-based nanolithography provides a flexible nano-lithographic technology. The tip fabrication is the main challenge of the technology. The combination of reactive ion etch and electrochemical machining provides a cost-efficient method for tip fabrication with nanoscale…
read more here.
Keywords:
array;
tip based;
fabrication;
based nanolithography ... See more keywords
Sign Up to like & get
recommendations!
0
Published in 2017 at "Journal of Manufacturing Processes"
DOI: 10.1016/j.jmapro.2017.07.016
Abstract: Abstract In this study, the AFM tip-based dynamic plowing lithography (DPL) method is utilized to conduct nanoscratching tests on the poly(methyl methacrylate) (PMMA) thin-film surface. Aim to fabricate none-ridge nanogrooves, a relatively large-radius probe in…
read more here.
Keywords:
ridge nanogrooves;
none ridge;
afm tip;
tip based ... See more keywords