Influence of Thin Film Deposition on AFM Cantilever Tips in Adhesion and Young’s Modulus of MEMS Surfaces
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DOI: 10.3390/ma15062102
Abstract: Adhesion is a critical factor in microelectromechanical systems (MEMSs) and is influenced by many parameters. In important fields, such as microassembly, an improved understanding of adhesion can result in higher precision. This study examines the… read more here.
Keywords: young modulus; modulus mems; adhesion; tips adhesion ... See more keywords