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Published in 2019 at "Advanced Optical Materials"
DOI: 10.1002/adom.201900669
Abstract: DOI: 10.1002/adom.201900669 sequestration.[5–7] There are three categories of techniques that have been used to manufacture TMPs; the first (canonical) category relies on photoor electron-beam (e-beam) lithography and etching. These methods permit unparalleled flexibility in user…
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Keywords:
category;
topographical micropatterns;
cleanroom;
optoelectronic tweezers ... See more keywords