A Deep Regression Framework Toward Laboratory Accuracy in the Shop Floor of Microelectronics
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DOI: 10.1109/tii.2022.3182343
Abstract: Deep learning (DL) has certainly improved industrial inspection, while significant progress has also been achieved in metrology with impressive results reached through their combination. However, it is not easy to deploy metrology sensors in a… read more here.
Keywords: regression framework; deep regression; methodology; toward laboratory ... See more keywords