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Published in 2020 at "Micromachines"
DOI: 10.3390/mi11070673
Abstract: Formaldehyde (HCHO), a chemical compound used in the fabrication process of a broad range of household products, is present indoors as an airborne pollutant due to its high volatility caused by its low boiling point…
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Keywords:
chip integration;
towards chip;
formaldehyde;
silicon ... See more keywords