Sign Up to like & get
recommendations!
0
Published in 2018 at "Journal of Materials Chemistry C"
DOI: 10.1039/c8tc00899j
Abstract: We proposed a simple method, a thermally purified solution (TPS) process, to lower the fabrication temperature of solution-processed hafnium oxide (HfOx) gate insulator films. The TPS process is proceeded by transferring thermal energy to the…
read more here.
Keywords:
solution processed;
hfox;
process;
solution ... See more keywords