Low-temperature fabrication of solution-processed hafnium oxide gate insulator films using a thermally purified solution process
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DOI: 10.1039/c8tc00899j
Abstract: We proposed a simple method, a thermally purified solution (TPS) process, to lower the fabrication temperature of solution-processed hafnium oxide (HfOx) gate insulator films. The TPS process is proceeded by transferring thermal energy to the… read more here.
Keywords: solution processed; hfox; process; solution ... See more keywords