Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure
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DOI: 10.1109/jmems.2020.3001560
Abstract: This paper reports the approach to boost the acoustic performances of PMUTs (Piezoelectric Micromachined Ultrasonic Transducers) including vibrational amplitude, acoustic pressure and electromechanical coupling by using the pinning boundary structure. An analytical model is developed… read more here.
Keywords: boundary structure; piezoelectric micromachined; micromachined ultrasonic; ultrasonic transducers ... See more keywords