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Published in 2019 at "IEEE Transactions on Components, Packaging and Manufacturing Technology"
DOI: 10.1109/tcpmt.2019.2925589
Abstract: A transferable-tip technology has been developed that has applications for wafer-level fine-pitch probe and electrical test of semiconductor devices. The tips are made by filling a mold made in a (100)-oriented Si substrate wafer, with…
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Keywords:
transferable tip;
test;
fine pitch;
tip technology ... See more keywords