Review of MEMS Based Fourier Transform Spectrometers
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DOI: 10.3390/mi11020214
Abstract: Fourier transform spectrometers (FTS), mostly working in infrared (IR) or near infrared (NIR) range, provide a variety of chemical or material analysis with high sensitivity and accuracy and are widely used in public safety, environmental… read more here.
Keywords: review mems; transform spectrometers; mems based; based fourier ... See more keywords