Structure transformation of Ti films deposited on SiC single crystal substrates
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DOI: 10.1016/j.matchar.2017.09.041
Abstract: Abstract This paper reports the structure transformation of Ti films deposited on SiC(0001) single crystal substrates using DC magnetron sputtering. Film thickness, sputter power and temperature of deposition were changed to investigate structure transformation of… read more here.
Keywords: transformation; structure transformation; films deposited; structure ... See more keywords