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Published in 2020 at "Journal of Magnetism and Magnetic Materials"
DOI: 10.1016/j.jmmm.2020.166434
Abstract: Abstract We have developed a system to measure permeability over a wide frequency range with high sensitivity, which we call the transformer coupled permeameter. In this system, the magnetic sample is sandwiched by two short-terminated…
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Keywords:
coupled permeameter;
high sensitivity;
permeability;
sensitivity ... See more keywords
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Published in 2024 at "Journal of Physics D: Applied Physics"
DOI: 10.1088/1361-6463/ad660f
Abstract: Remote plasmas are used in semiconductor device manufacturing as sources of radicals for chamber cleaning and isotropic etching. In these applications, large fluxes of neutral radicals (e.g. F, O, Cl, H) are desired with there…
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Keywords:
nf3 mixtures;
transformer coupled;
remote plasma;
plasma ... See more keywords
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Published in 2025 at "IEEE Transactions on Plasma Science"
DOI: 10.1109/tps.2025.3590067
Abstract: A novel solution for the electrical connection of transformer-coupled LC inversion generators (TCLCGs) is presented and evaluated in terms of performance relative to the conventional “textbook” circuit topology through experimental and simulation-based analyses. The solution,…
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Keywords:
circuit;
inversion generators;
transformer coupled;
topology ... See more keywords