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Published in 2021 at "Vacuum"
DOI: 10.1016/j.vacuum.2021.110528
Abstract: Abstract The continuous effort for transitioning pulsed laser deposition (PLD) technique from an experimental tool into an industrial one can be sustained by the use of complex tools for in situ real-time monitoring of the…
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Keywords:
transient plasmas;
situ optical;
electrical analysis;
analysis transient ... See more keywords