Time-resolved evolution of collisional transient sheath in plasma source ion implantation
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DOI: 10.1088/1402-4896/ac33f8
Abstract: In this work, an analytical model for the time-resolved dynamics of the collisional transient sheath in the plasma source ion implantation (PSII) process is developed. The presented model can forecast the temporal dependence of the… read more here.
Keywords: transient sheath; sheath plasma; time resolved; ion ... See more keywords