Transmitting Sensitivity Enhancement of Piezoelectric Micromachined Ultrasonic Transducers via Residual Stress Localization by Stiffness Modification
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DOI: 10.1109/led.2019.2904293
Abstract: Residual stress dramatically affects the performance of piezoelectric micromachined ultrasonic transducers (pMUTs), in particular, the transmitting sensitivity. This letter presents a novel architecture for pMUTs with V-shaped springs. Stiffness modification achieved by the V-shaped springs… read more here.
Keywords: piezoelectric micromachined; residual stress; transmitting sensitivity; micromachined ultrasonic ... See more keywords