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Published in 2022 at "Optics express"
DOI: 10.1364/oe.470304
Abstract: As a highly accurate metrology, phase measuring deflectometry (PMD) can be used for in-situ surface shape measurement. However, due to the reflection off the back surface, PMD cannot measure both the front and back surfaces…
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Keywords:
planar element;
transparent planar;
deflectometry;
front back ... See more keywords