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Published in 2020 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2020.105108
Abstract: Abstract Modifications in the defects and electronic transport properties of epitaxial 4H-nSiC(0001) Schottky barrier diodes have been carried out by selective 200 MeV Ag+14 ions irradiation, i.e., ions projected only on the Schottky contact area of…
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Keywords:
irradiation;
transport;
transport epitaxial;
epitaxial sic ... See more keywords