Characterization of transport of titanium neutral atoms sputtered in Ar and Ar/N2 HIPIMS discharges
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DOI: 10.1088/1361-6595/ab022b
Abstract: In this work we report on the investigation of the transport behavior of Ti neutral atoms sputtered in a reactive high power impulse magnetron sputtering device used for TiN coating deposition. The time-resolved tunable diode… read more here.
Keywords: transport; titanium neutral; transport titanium; atoms sputtered ... See more keywords