Novel X -band transverse deflection structure with variable polarization
Sign Up to like & getrecommendations! Published in 2020 at "Physical review accelerators and beams"
DOI: 10.1103/physrevaccelbeams.23.112001
Abstract: A collaboration between DESY, PSI and CERN has developed and built an advanced modular X-band transverse deflection structure (TDS) system with the new feature of providing variable polarization of the deflecting force. The prototype of… read more here.
Keywords: deflection structure; polarization; band transverse; band ... See more keywords
Transverse Deflection for Extreme Ultraviolet Pellicles
Sign Up to like & getrecommendations! Published in 2023 at "Materials"
DOI: 10.3390/ma16093471
Abstract: Defect control of extreme ultraviolet (EUV) masks using pellicles is challenging for mass production in EUV lithography because EUV pellicles require more critical fabrication than argon fluoride (ArF) pellicles. One of the fabrication requirements is… read more here.
Keywords: transverse deflection; euv; extreme ultraviolet; deflection extreme ... See more keywords