Study on line‐scan profile for a trapezoid line under varying sample temperatures through Monte–Carlo simulation
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DOI: 10.1111/jmi.13343
Abstract: This study investigates the influence of the sample inherent temperature on the line‐scan profile for a silicon trapezoid line with different sidewall angles by Monte–Carlo simulation. This study demonstrates that the profile varies with temperature,… read more here.
Keywords: trapezoid line; line scan; line; study ... See more keywords