Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale
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DOI: 10.1117/1.oe.56.6.064103
Abstract: Abstract. We propose a laser trapping-based scanning dimensional measurement method for free-form surfaces. We previously developed a laser trapping-based microprobe for three-dimensional coordinate metrology. This probe performs two types of measurements: a tactile coordinate and… read more here.
Keywords: laser; scanning dimensional; standing wave; trapped microsphere ... See more keywords