A Customized Nonlinear Micro-Flexure for Extending the Stable Travel Range of MEMS Electrostatic Actuator
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DOI: 10.1109/jmems.2019.2894669
Abstract: The stable travel range of parallel-plate electrostatic actuator with a linear suspension flexure is limited to a third of the nominal gap due to the pull-in instability resulting from the inherent nonlinear behavior of electrostatic… read more here.
Keywords: flexure; stable travel; force; electrostatic actuator ... See more keywords