Decision Tree Ensemble-Based Wafer Map Failure Pattern Recognition Based on Radon Transform-Based Features
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DOI: 10.1109/tsm.2018.2806931
Abstract: Wafer maps contain information about defects and clustered defects that form failure patterns. Failure patterns exhibit the information related to defect generation mechanisms. The accurate classification of failure patterns in wafer maps can provide crucial… read more here.
Keywords: decision; wafer map; tree ensemble; failure ... See more keywords